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Vacuum Systems and Technology

National Research Nuclear University MEPhI via edX

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Overview

Vacuum technology is key to our high-tech society. It is is used for a large number of technical processes and products, including computer chips, nanostructures, microelectronic coatings and components as well as chemical and biological techniques.

In this engineering course, you will get a comprehensive overview of the construction and working principles of vacuum devices and systems to help you better design materials and processes .

Syllabus

Section 1. Vacuum theory

  • Vacuum application. Introducing on molecular-kinetic theory of gases
  • Molecular-kinetic theory of gases
  • Sorption phenomena in vacuum
  • Condensation and evaporation
  • Physical processes in vacuum

Section 2. Mechanical means of obtaining a vacuum

  • Mechanical vacuum pumps of preliminary vacuum. Construction, working principles and characteristics. Part 1
  • Mechanical vacuum pumps of preliminary vacuum. Construction, working principles and characteristics. Part 2
  • Turbine and diffusion pumps. Construction, working principles and characteristics
  • Ejector pump. Vacuum traps. Construction, working principles and characteristics

Section 3. Physical-chemical means of obtaining a vacuum

  • Ion and ion-getter pumps. Construction, working principles and characteristics
  • Sublimation and sputter ion pumps. Construction, working principle, characteristics
  • Sorption and condensation pumps. Construction, working principles and characteristics 

Section 4. Methods of pressure measurement

  • Methods of total pressure measurement. Aneroid and hydrostatic vacuum gauges
  • Methods of total pressure measurement. Thermal vacuum gauges
  • Methods of total pressure measurement. Ionization vacuum gauges
  • Methods of partial pressure measurement. Type of analyzers and traps
  • Methods of partial pressure measurement. Mass-spectrometers

Section 5. Constructional elements of vacuum systems

  • Valves and gates. Construction, working principle
  • Leek valves. Construction, working principle
  • Vacuum feedthroughs
  • Methods of leak detection

Section 6. Construction principles of vacuum systems

  • Calculation of vacuum systems to select of vacuum pumps
  • Vacuum systems with diffusion and turbine pumps
  • Vacuum systems with ion and condensation pumps
  • Type of sealing

Taught by

Valikov A. Roman

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