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NPTEL

MEMS & Microsystems

NPTEL and Indian Institute of Technology, Kharagpur via YouTube

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Overview

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Instructor: Prof. Santiram Kal, Department of Electronics and Electrical Communication Engineering, IIT Kharagpur.

This course covers lessons in micro sensors, MEMS materials and its properties, micro electronic and micromachining technology for MEMS, etch stop techniques, micro stereolithography, MEMS accelerometers and inertial sensors, interface electronics for MEMS and BIO-MEMS.

Syllabus

Lecture - 1 Introduction to MEMS & Microsystems.
Lecture - 2 Introduction to Microsensors.
Lecture - 3 Evoluation of MEMS, Microsensors, Market Survey.
Lecture - 4 Application of MEMS.
Lecture - 5 MEMS Materials.
Lecture - 6 MEMS Materials' Properties.
Lecture - 7 MEMS Materials Properties (Contd.).
Lecture - 8 Microelectronic Technology for MEMS - II.
Lecture - 9 Microelectronic Technology for MEMS - III.
Lecture - 10 Micromachining Technology for MEMS.
Lecture - 11 Micromachining Process.
Lecture - 12 Etch Stop Techniques and Microstructure.
Lecture - 13 Surface and Quartz Micromachining.
Lecture - 14 Fabrication of Micromachined Microstructure.
Lecture - 15 Microstereolithography.
Lecture - 16 MEMS Microsensors Thermal.
Lecture - 17 Micromachined Microsensors Mechanical.
Lecture - 18 MEMS Pressure and Flow Sensor.
Lecture - 19 Micromachined Flow Sensors.
Lecture - 20 MEMS Inertial Sensors.
Lecture - 21 Micromachined Microaccelerometers for MEMS.
Lecture - 22 MEMS Accelerometers for Avionics.
Lecture - 23 Temperature Drift and Damping Analysis.
Lecture - 24 Piezoresistive Accelerometer Technology.
Lecture - 25 MEMS Capacitive Accelerometer.
Lecture - 26 MEMS Capacitive Accelerometer Process.
Lecture - 27 MEMS Gyro Sensor.
Lecture - 28 MEMS for Space Application.
Lecture - 29 Polymer MEMS & Carbon Nano Tubes CNT.
Lecture - 30 Wafer Bonding & Packaging of MEMS.
Lecture - 31 Interface Electronics for MEMS.
Lecture - 32 MEMS for Biomedical Applications (Bio-MEMS).

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Reviews

4.0 rating, based on 1 Class Central review

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  • Profile image for Balanagu Siddhartha
    Balanagu Siddhartha
    nice valueable course and very useful for people like who wants to know about mems technology and very helpful for people who are not in iit and for people who wants to start thier career in vlsi and other related course
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