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Direct write laser lithography
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Classroom Contents
DIY Laser Lithography - Micron Resolution
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- 1 Direct write laser lithography
- 2 Some exposed photoresist
- 3 Spatial filtering
- 4 Focus detection unused
- 5 Walking the beam
- 6 Galvo scanner
- 7 Scan/Tube lens
- 8 Microscope Objective and substrate
- 9 Optical Rlay Full Explanation
- 10 2x Beam Expander
- 11 Results Datak Er-71
- 12 Results Microposit s1818
- 13 Problems to fix
