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Intro
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Classroom Contents
Electron Beam Lithography - Drawing Images with Electrons
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- 1 Intro
- 2 Electron Beam Lithography
- 3 Substrate Choice
- 4 PMMA Resist
- 5 How do e-beam resists work?
- 6 Development
- 7 Results!
- 8 Dose Dependence
- 9 Resist Thickness
- 10 Substrate
- 11 Accelerating Voltage
- 12 Proximity Effect
- 13 Emission Current
- 14 SEM vs EBL
- 15 Fast Beam Blanker
- 16 PMMA dosing - Positive vs Negative resist
- 17 Next Steps
- 18 Curiosity Rover Wheel!
