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Arizona State University

Electron and Ion Beam Characterization

Arizona State University via Coursera

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Overview

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Electron and ion beams are widely used for both qualitative and quantitative analysis of semiconductor materials and devices. They can be used to image structures with sub-nm resolution and to provide information about elemental composition and dopant concentration. This course describes the fundamentals of electron and ion beam characterization and includes a project that analyzes the surface roughness of a solar cell.

Syllabus

  • Course Introduction
    • Electron and ion beams are widely used for both qualitative and quantitative analysis of semiconductor materials and devices. They can be used to image structures with sub-nm resolution and to provide information about elemental composition and dopant concentration. This course describes the fundamentals of electron and ion beam characterization and includes a project that analyzes the surface roughness of a solar cell.
  • Week 4.1: Scanning Electron Microscopy
    • This week introduces the concepts of scanning electron microscopy and how it is used for both qualitative and quantitative sample analysis.
  • Week 4.2: Auger Electron Spectroscopy
    • This week, you will learn about Auger electron emission spectroscopy, a powerful technique for surface analysis.
  • Week 4.3: Secondary Ion Mass Spectroscopy
    • This week, you will learn about secondary ion mass spectroscopy and how it is used to measure the concentration and distribution of constituent materials in semiconductors.
  • Week 4.4: Course Wrap-up and Project
    • This week, you will complete a case study to assess your ability to use images obtained from an SEM for quantitative surface analysis.

Taught by

Trevor Thornton and Craig Smith

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