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Intro

edX: Micro and Nanofabrication (MEMS)

 with  Juergen Brugger and Martin Gijs

Microfabrication and nanofabrication are the basis of manufacturing for nearly all modern miniaturized systems that are ubiquitously used in our daily life. Examples include; computer chips and integrated sensors for monitoring our environment, cars, mobile phones, medical devices and more.

Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen.

In this engineering course, we will go a step beyond classroom teaching to not only explain the basics of each fabrication step but also show you how it’s done through video sequences and zooming into the equipment. 

Syllabus

Week 1: MEMS and cleanroom introduction
This module introduces the basics of electromechanical systems (MEMS) and cleanroom fabrication.

Week 2: Chemical vapor deposition (CVD)
This module on chemical vapor deposition or CVD describes in detail basic principles of CVD and will show you the cleanroom infrastructure that is used to run a CVD process.

Week 3: Physical vapor deposition (PVD)
This module on physical vapor deposition describes in details the two main PVD methods; thermal evaporation and sputtering.

Week 4: Lithography
This module on lithography describes in details the two main resist patterning methods: optical and electron beam lithography.

Week 5: Dry etching
This module on dry etching describes etching in a gas environment. We will introduce etching directionality and anisotropy and give a few simple rules for choosing dry etching processes for specific materials in a plasma reactor and provide theoretical concepts that characterize a plasma in a dry etching equipment.

Week 6: Wet etching
This module on wet etching describes etching in a liquid environment. We will introduce anisotropic wet etching of silicon substrates, where certain lattice planes are etched and others not, isotropic etching of silicon, and finally thin membrane microfabrication techniques using wet etching.

Week 7: Inspection and metrology
This module describes methods of inspection and metrology based on four technique categories: optical, mechanical, charged beam and electrical.
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Cost Free Online Course
Pace Self Paced
Subject Nanotechnology
Provider edX
Language English
Certificates $50 Certificate Available
Hours 3 hours a week
Calendar 8 weeks long
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FAQ View All
What are MOOCs?
MOOCs stand for Massive Open Online Courses. These are free online courses from universities around the world (eg. Stanford Harvard MIT) offered to anyone with an internet connection.
How do I register?
To register for a course, click on "Go to Class" button on the course page. This will take you to the providers website where you can register for the course.
How do these MOOCs or free online courses work?
MOOCs are designed for an online audience, teaching primarily through short (5-20 min.) pre recorded video lectures, that you watch on weekly schedule when convenient for you.  They also have student discussion forums, homework/assignments, and online quizzes or exams.

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